| 000 | 00517pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3527310800 | ||
| 082 |
_a621.3815 _bC62 |
||
| 100 | _aBrand,O. | ||
| 245 | 1 | _aCMOS-MEMS | |
| 260 |
_a _bWiley-Vch, Weinheim _c2005 |
||
| 300 | _axiv,594 | ||
| 440 |
_aAdvanced Micro & Nanosystems _v |
||
| 650 | _aMetal Oxide Semiconductors, Complementary | ||
| 650 | _aMicroelectromechanical Systems | ||
| 700 | _aFedder,G. K. | ||
| 964 | _gCIRC | ||
| 997 | _aA151623 C | ||
| 999 |
_c349368 _d349368 |
||