000 00757pam a2200229a 44500
005 20170508143348.0
008 160408b2003 xxu||||| |||| 00| 0 eng d
020 _a0306478587
040 _cIITK
041 _aeng
082 _a621.381531
_bAl79
100 _aClivia M. Sotomayor Torres,No
245 1 _aALTERNATIVE LITHOGRAPHY
_bunleashing the potentials of nanotechnology
_cedited by Clivia M. Sotomayor Torres
260 _aNew York
_bKluwer Academic / Plenum Publishers
_c2003
300 _axx, 333p
440 _aNanostructure Science And Technology / edited by David J. Lockwood
650 _aMolecular electronics
650 _aMicrolithography
650 _aNanotechnology
700 _aTorres, Clivia M. Sotomayor [ed.]
942 _cBK
999 _c349017
_d349017