| 000 | 00541pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0815514832 | ||
| 082 |
_a621.38152 _bW269T |
||
| 100 | _aWasa,Kiyotaka,Kitabatake,Makoto | ||
| 245 | 1 |
_aTHIN FLIM MATERIALS TECHNOLOGY _cSPUTTERING OF COMPOUND MATERIALS |
|
| 260 |
_a _bWilliam Andrew Pub., Norwich, Ny _c2004 |
||
| 300 | _axiv,518 | ||
| 650 | _aCathode Sputtering (Planing Process) | ||
| 650 | _aThin Films | ||
| 700 | _aAdachi,Hideaki | ||
| 964 | _gCIRC | ||
| 997 | _aA149502 C | ||
| 999 |
_c348991 _d348991 |
||