000 00502pam a2200181a 44500
008 160408bc2001 xxu||||| |||| 00| 0 eng d
020 _a0849300770
082 _a621
_bM519
100 _aMohamed Gad-El-Hak,No
245 1 _aTHE MEMS HANDBOOK
260 _a
_bCrc Press,Boca Raton
_cc2001
300 _axi,36
440 _aThe Mechanical Engineering Handbook
_v
650 _aMechanical Engineering -- Handbook, Manuals, Etc
700 _aKreith,Frank
964 _gCIRC
997 _aA135728 C
999 _c348924
_d348924