000 00470pam a2200169a 44500
008 160408b2003 xxu||||| |||| 00| 0 eng d
020 _a0521822815
082 _a621.38152
_bF895T
100 _aFreund,L. B.
245 1 _aTHIN FILM MATERIALS
_cSTRESS, DEFECT FORMATION AND SURFACE EVOLUTION
260 _a
_bCambridge Univ. Press, Cambridge
_c2003
300 _axviii,750
650 _aThin Films
700 _aSuresh,S.
964 _gCIRC
997 _aA148047 s C
999 _c347514
_d347514