| 000 | 00514pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2003 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1402076207 | ||
| 082 |
_a621.381 _bOP7 |
||
| 100 | _aAnanthasuresh,G. K. | ||
| 245 | 1 | _aOPTIMAL SYNTHESIS METHODS FOR MEMS | |
| 260 |
_a _bKluwer Academic Publishers, Boston _c2003 |
||
| 300 | _a320 | ||
| 440 |
_aKluwer International Series In Microsystems _v |
||
| 650 | _aMicroelectromechanical System -- Computer Simulation | ||
| 964 | _gCIRC | ||
| 997 | _aA148045 s C | ||
| 999 |
_c347513 _d347513 |
||