| 000 | 00503pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b1997 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0849394511 | ||
| 082 |
_a621.38152 _bM266F |
||
| 100 | _aMadou,Marc | ||
| 245 | 1 | _aFUNDAMENTALS OF MICROFABRICATION | |
| 260 |
_a _bCrc Press, Boca Raton _c1997 |
||
| 300 | _a581 | ||
| 650 | _aMicroelectronics -- Design Design And Construction | ||
| 650 | _aMachining | ||
| 650 | _aMicroelectronic Packaging | ||
| 964 |
_cText _gCIRC |
||
| 997 | _aA138668 C | ||
| 999 |
_c347445 _d347445 |
||