| 000 | 00512pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a184265151X | ||
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bK837p |
||
| 100 | _aKonuma, Mitsuharu | ||
| 245 | 1 |
_aPlasma techniques for film deposition _cby Mitsuharu Konuma |
|
| 260 |
_bAlpha Science International Ltd. _c2005 _aHarrow |
||
| 300 | _aix, 337p | ||
| 650 | _aThin Films | ||
| 650 | _aPlasma-Enhanced Chemical Vapor Deposition | ||
| 942 | _cBK | ||
| 999 |
_c347406 _d347406 |
||