000 | 00541pam a2200193a 44500 | ||
---|---|---|---|
008 | 160408b2002 xxu||||| |||| 00| 0 eng d | ||
020 | _a0849311543 | ||
082 |
_a621.36 _bM66F |
||
100 | _aMinh,Phan Ngoc,Takahito,Ono | ||
245 | 1 | _aFABRICATION OF SILICON MICROPROBES FOR OPTICAL NEAR-FIELD APPLICATIONS | |
260 |
_a _bCrc Press, Boca Raton _c2002 |
||
300 | _a180 | ||
650 | _aMicromachining | ||
650 | _aSilicon | ||
650 | _aNear--Field Microscopy | ||
700 | _aMasayoshi,Esashi | ||
964 | _gCIRC | ||
997 | _aA140745 s C | ||
999 |
_c346781 _d346781 |