000 00541pam a2200193a 44500
008 160408b2002 xxu||||| |||| 00| 0 eng d
020 _a0849311543
082 _a621.36
_bM66F
100 _aMinh,Phan Ngoc,Takahito,Ono
245 1 _aFABRICATION OF SILICON MICROPROBES FOR OPTICAL NEAR-FIELD APPLICATIONS
260 _a
_bCrc Press, Boca Raton
_c2002
300 _a180
650 _aMicromachining
650 _aSilicon
650 _aNear--Field Microscopy
700 _aMasayoshi,Esashi
964 _gCIRC
997 _aA140745 s C
999 _c346781
_d346781