| 000 | 00471pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1903996473 | ||
| 082 |
_a621.381 _bM581B |
||
| 100 | _aJumana Boussey,No | ||
| 245 | 1 |
_aMICROSYSTEMS TECHNOLOGY _cFABRICATION, TEST AND RELIABILITY |
|
| 260 |
_a _bKogan Page, London _c2002 |
||
| 300 | _avi,295 | ||
| 650 | _aMicroelectromechanical Systems | ||
| 700 | _aBoussey,Jumana | ||
| 964 | _gCIRC | ||
| 997 | _aA145900 C | ||
| 999 |
_c346386 _d346386 |
||