| 000 | 00513pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2003 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3540002529 | ||
| 082 |
_a621.381 _bM72N |
||
| 100 | _aNassar,Raja | ||
| 245 | 1 | _aMODELLING OF MICROFABRICATION SYSTEMS | |
| 260 |
_a _bSpringer-Verlag, Berlin _c2003 |
||
| 300 | _ax,269 | ||
| 650 | _aMicroelectronics -- Mathematical Models | ||
| 650 | _aIntegrated Circuits -- Mathematical Models | ||
| 700 | _aDai,Weizhong | ||
| 964 | _gCIRC | ||
| 997 | _aA145684 C | ||
| 999 |
_c346381 _d346381 |
||