000 00501pam a2200169a 44500
008 160408b2003 xxu||||| |||| 00| 0 eng d
020 _a0819448559
082 _a681.2
_bSM11I
100 _aDaniele Inaudi,Eric Udd
245 1 _aSMART SENSOR TECHNOLOGY AND MEASUREMENT SYSTEMS
260 _a
_bSpie-The International Soc. For Optical Engg., Washington
_c2003
300 _axxiii,380
650 _aSensor Manufacturing Technology
700 _aUdd,Eric
964 _gCIRC
997 _aA146185 C
999 _c345644
_d345644