| 000 | 00508pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0750309768 | ||
| 082 |
_a621.044 _bM289P |
||
| 100 | _aMakabe,T. | ||
| 245 | 1 |
_aPLASMA ELECTRONICS _cAPPLICATIONS IN MICROELECTRONIC DEVICE FABRICATION |
|
| 260 |
_a _bTaylor & Francis, New York _c2006 |
||
| 300 | _a339 | ||
| 440 |
_aSeries In Plasma Physics _v |
||
| 650 | _aPlasma Engineering | ||
| 700 | _aPetrovic,Z. | ||
| 964 | _gCIRC | ||
| 997 | _aA155533 C | ||
| 999 |
_c345118 _d345118 |
||