000 00577pam a2200205a 44500
008 160408b2003 xxu||||| |||| 00| 0 eng d
020 _a3540678190
082 _a621.3815
_bL95
100 _aHo,P. S.,Leu,J.
245 1 _aLOW DIELECTRIC CONSTANT MATERIALS FOR IC APPLICATIONS
260 _a
_bSpringer-Verlag, Berlin
_c2003
300 _axix,309
440 _aAdvanced Microelectronics
_v
650 _aElectric Insulators And Insulation
650 _aDielectrics
650 _aIntegrated Circuits
700 _aLee,W. W.
964 _gCIRC
997 _aA152647 s C
999 _c345112
_d345112