000			00459pam a2200169a 44500
008			160408bc2001 xxu||||| |||| 00| 0 eng d
020			_a0471868426
082			_a620.86 _bW623C
100			_aWhyte,W.
245	1		_aCLEANROOM TECHNOLOGY _cFUNDAMENTALS OF DESIGN, TESTING AND OPERATION
260			_a _bJohn Wiley, Chichester _cc2001
300			_axiv,309
500			_aIncludes Index
650			_aClean Rooms
964			_gCIRC
997			_aA143235 s C
999			_c345056 _d345056