000 00730pam a2200229a 44500
005 20170508143749.0
008 160408bc2002 xxu||||| |||| 00| 0 eng d
020 _a0415273552
040 _cIITK
041 _aeng
082 _a621.381
_bEl25m
245 1 _aELECTROCHEMICAL MICROSYSTEM TECHNOLOGIES
_cedited by J. Walter Schultze, Tetsuya Osaka and Madhav Datta
260 _a London
_bTaylor & Francis
_c2002
300 _axviii, 569p
440 _aNew Trends In Electrochemical Technology / edited by Tetsuya Osaka
650 _aElectrochemistry, Industrial
650 _aMicroelectronics
700 _aSchultze, J. Walter [ed.]
700 _aOsaka, Tetsuya [ed.]
700 _aDatta, Madhav [ed.]
942 _cBK
999 _c344885
_d344885