| 000 | 00483pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1580539017 | ||
| 082 |
_a621.381 _bSE28P |
||
| 100 | _aSedky,Sherif | ||
| 245 | 1 | _aPOST-PROCESSING TECHNIQUES FOR INTEGRATED MEMS | |
| 260 |
_a _bArtech House, Boston _c2006 |
||
| 300 | _axiv,207 | ||
| 440 |
_aMicroelectromechanical Systems Series _v |
||
| 650 | _aMicroelectromechanical Systems | ||
| 964 | _gCIRC | ||
| 997 | _aA155566 s C | ||
| 999 |
_c344823 _d344823 |
||