| 000 | 00434pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0849312620 | ||
| 082 |
_a621.381 _bL98M |
||
| 100 | _aLyshevski,Sergey Edward | ||
| 245 | 1 |
_aMEMS AND NEMS _cSYSTEMS, DEVICES, AND STRUCTURES |
|
| 260 |
_a _bCrc Press, Boca Raton _c2002 |
||
| 300 | _a461 | ||
| 650 | _aMicroelectromechanical Systems | ||
| 964 | _gCIRC | ||
| 997 | _aA142150 C | ||
| 999 |
_c344768 _d344768 |
||