000 00488pam a2200169a 44500
008 160408b2003 xxu||||| |||| 00| 0 eng d
020 _a0471201693
082 _a621.381
_bR241R
100 _aRebeiz,Gabriel M.
245 1 _aRF MEMS
_cTHEORY, DESIGN AND TECHNOLOGY
260 _a
_bJohn Wiley & Sons Inc., New Jersey
_c2003
300 _axx,483
650 _aMicroelectromechanical Systems
650 _aVery High Speed Integrated Circuits
964 _gCIRC
997 _aA143781 C
999 _c344554
_d344554