000 | 00488pam a2200169a 44500 | ||
---|---|---|---|
008 | 160408b2003 xxu||||| |||| 00| 0 eng d | ||
020 | _a0471201693 | ||
082 |
_a621.381 _bR241R |
||
100 | _aRebeiz,Gabriel M. | ||
245 | 1 |
_aRF MEMS _cTHEORY, DESIGN AND TECHNOLOGY |
|
260 |
_a _bJohn Wiley & Sons Inc., New Jersey _c2003 |
||
300 | _axx,483 | ||
650 | _aMicroelectromechanical Systems | ||
650 | _aVery High Speed Integrated Circuits | ||
964 | _gCIRC | ||
997 | _aA143781 C | ||
999 |
_c344554 _d344554 |