| 000 | 00486pam a2200181a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 160408b2000 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0890065810 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bM299i |
||
| 100 | _aMaluf, Nadim | ||
| 245 | 1 |
_aINTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING _cNadim Maluf |
|
| 260 |
_bArtech House _c2000 _aBoston |
||
| 300 | _axix, 265p | ||
| 650 | _aMicroelectromechanical Systems | ||
| 942 | _cBK | ||
| 999 |
_c343801 _d343801 |
||