| 000 | 00534pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408bc2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0824703804 | ||
| 082 |
_a621.38152 _bC767 |
||
| 100 | _aDonovan,Robert P. | ||
| 245 | 1 | _aCONTAMINATION - FREE MANUFACTURING FOR SEMICONDUCTORS AND OTHER PRECISION PRODUCTS | |
| 260 |
_a _bMarcel Dekker, New York _cc2001 |
||
| 300 | _ax,448 | ||
| 500 | _aIncludes Bibliographical References And Index. | ||
| 650 | _aSemiconductor - Manufacturing | ||
| 964 | _gCIRC | ||
| 997 | _aA136106 s C | ||
| 999 |
_c343062 _d343062 |
||