| 000 | 00532pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0792372468 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.381 _bSe59m |
||
| 100 | _aSenturia, Stephen D. | ||
| 245 | 1 |
_aMicrosystem design _cStephen D. Senturia |
|
| 260 |
_aBoston _bKluwer Academic Publishers _c2001 |
||
| 300 | _axix, 689p. | ||
| 650 | _aMicroelectromechanical Systems--Design And Construction | ||
| 650 | _aSystem Design | ||
| 997 | _aA140068 C | ||
| 999 |
_c342113 _d342113 |
||