000			00495pam a2200169a 44500
008			160408b1992 xxu||||| |||| 00| 0 eng d
020			_a0 19 856432 5
082			_a621.38152 _bR39
100			_aRichards,B. P.,Footner,P. K.
245	1		_aTHE ROLE OF MICROSCOPY IN SEMICONDUCTOR FAILURE ANALYSIS
260			_a _bOxford Univ. Pr.,Oxford _c1992
300			_avi 108
650			_aSemiconductors -- Testing
650			_aMicroscope And Microscopy
964			_gCIRC
997			_aA116025 s C
999			_c341606 _d341606