| 000 | 00496pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408bc2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1402071752 | ||
| 082 |
_a621.381 _bM418 |
||
| 100 | _aF E H Tay,No | ||
| 245 | 1 | _aMATERIALS & PROCESS INTEGRATION FOR MEMS | |
| 260 |
_a _bKluwer Academic Publishers, Boston _cc2002 |
||
| 300 | _axix,299 | ||
| 440 |
_aMicrosystems _vV.9 |
||
| 650 | _aMicroelectromechanical Systems | ||
| 700 | _aTay,F E H | ||
| 964 | _gCIRC | ||
| 997 | _aA142644 s C | ||
| 999 |
_c341353 _d341353 |
||