| 000 | 00592pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408bc2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0792376552 | ||
| 082 |
_a005.6 _bL188O |
||
| 100 | _aLammel,Gerhard,Schweizer,Sandra | ||
| 245 | 1 | _aOPTICAL MICROSCANNERS AND MICROSPECTROMETERS USING THERMAL BIMORPH ACTUATORS | |
| 260 |
_a _bKluwer Academic Publishers, Boston _cc2002 |
||
| 300 | _axii,268 | ||
| 440 |
_aMicrosystems _vV.8 |
||
| 650 | _aMicroprogramming, Computers | ||
| 650 | _aMicrosystems, Computers | ||
| 700 | _aRenaud,Philippe | ||
| 964 | _gCIRC | ||
| 997 | _aA141164 C | ||
| 999 |
_c340950 _d340950 |
||