| 000 | 00564pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2007 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3540346120 | ||
| 082 |
_a621.381 _bB387F |
||
| 100 | _aBechtold,T.,Rudnyi,E. B. | ||
| 245 | 1 |
_aFAST SIMULATION OF ELECTRO-THERMAL MEMS _cEFFICIENT DYNAMIC COMPACT MODELS |
|
| 260 |
_a _bSpringer-Verlag, Berlin _c2007 |
||
| 300 | _axi,180 | ||
| 440 |
_aMicrotechnology And Mems _v |
||
| 650 | _aMicroelectromechanical Systems -- Mathematical Models | ||
| 700 | _aKorvink,J. G. | ||
| 964 | _gCIRC | ||
| 997 | _aA157090 s C | ||
| 999 |
_c339997 _d339997 |
||