| 000 | 00565pam a2200205a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240806162504.0 | ||
| 008 | 160408b2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0125249756 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bOh6m2 |
||
| 100 | _aOhring, Milton | ||
| 245 | 1 |
_aMaterials science of thin films _bdeposition and structure [2nd ed.] _cMilton Ohring |
|
| 250 | _a2nd ed. | ||
| 260 |
_aSan Diego _bAcademic Press _c2002 |
||
| 300 | _axxi, 794p. | ||
| 650 | _aVacuum science -- Thin film technology | ||
| 942 | _cBK | ||
| 999 |
_c337826 _d337826 |
||