| 000 | 00636pam a2200181a 44500 | ||
|---|---|---|---|
| 005 | 20170508104430.0 | ||
| 008 | 160408bc2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0815514425 | ||
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a621.38172 _bH191s2 |
||
| 245 | 1 |
_aHANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES _bPRINCIPLES, METHODS, EQUIPMENT AND APPLICATIONS _cedited by Krishna Seshan |
|
| 260 |
_aNew York _bNoyes Publications/William Andrew Pub _c2002 |
||
| 300 | _axxviii, 629p | ||
| 650 | _aThin Film Devices -- Design and construction -- Handbook, manuals, etc. | ||
| 700 | _aSeshan, Krishna [ed.] | ||
| 942 | _cBK | ||
| 999 |
_c337811 _d337811 |
||