| 000 | 00502pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1852331445 | ||
| 082 |
_a621.044 _bC426 |
||
| 100 | _aCheung,Kin P. | ||
| 245 | 1 | _aPLASMA CHARGING DAMAGE. | |
| 260 |
_a _bSpringer-Verlag, London _c2001 |
||
| 300 | _axii,346 | ||
| 650 | _aSemicoductors -- Effect Of Radiation On | ||
| 650 | _aMetal Oxide Semiconductors -- Defects | ||
| 650 | _aPlasma Radiation | ||
| 964 | _gCIRC | ||
| 997 | _aA138135 C | ||
| 999 |
_c337583 _d337583 |
||