000 00553pam a2200193a 44500
008 160408b2001 xxu||||| |||| 00| 0 eng d
020 _a0849316553
082 _a621.381046
_bH191C
100 _aBarbara No Kanegsberg,Edward No Kanegsberg
245 1 _aHANDBOOK FOR CRITICAL CLEANING
260 _a
_bCrc Press, Boca Raton
_c2001
300 _a658
650 _aIntegrated Circuits -- Cleaning
650 _aManufacturing Processes
650 _aElectronic Packaging
700 _aKanegsberg,Edward
964 _gCIRC
997 _aA133214 s C
999 _c337330
_d337330