000 | 00553pam a2200193a 44500 | ||
---|---|---|---|
008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
020 | _a0849316553 | ||
082 |
_a621.381046 _bH191C |
||
100 | _aBarbara No Kanegsberg,Edward No Kanegsberg | ||
245 | 1 | _aHANDBOOK FOR CRITICAL CLEANING | |
260 |
_a _bCrc Press, Boca Raton _c2001 |
||
300 | _a658 | ||
650 | _aIntegrated Circuits -- Cleaning | ||
650 | _aManufacturing Processes | ||
650 | _aElectronic Packaging | ||
700 | _aKanegsberg,Edward | ||
964 | _gCIRC | ||
997 | _aA133214 s C | ||
999 |
_c337330 _d337330 |