| 000 | 00555pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3540675825 | ||
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a681.2 _bEL87m |
||
| 100 | _aElwenspoek, M. | ||
| 245 | 1 | _aMECHANICAL MICROSENSORS | |
| 260 |
_bSpringer-Verlag, _c2001 _aBerlin |
||
| 300 | _ax, 295p | ||
| 650 | _aDetectors -- Design And Constructions | ||
| 650 | _aMicroelectromechanical Systems -- Design And Construction | ||
| 650 | _aTranducers | ||
| 700 | _aWiegerink, R. | ||
| 942 | _cBK | ||
| 999 |
_c336702 _d336702 |
||