| 000 | 00556pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b2000 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471246980 | ||
| 082 |
_a671.7 _bH191P |
||
| 100 | _aAndre No Anders | ||
| 245 | 1 | _aHANDBOOK OF PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION | |
| 260 |
_a _bJohn Wiley, New York _c2000 |
||
| 300 | _axxiii,736 | ||
| 650 | _aIon Implantation | ||
| 650 | _aIon Bombardment -- Industrial Applications | ||
| 650 | _aPlasma (Ionized Gases) | ||
| 700 | _aAnders,Andre | ||
| 964 | _gCIRC | ||
| 997 | _aA132960 C | ||
| 999 |
_c336338 _d336338 |
||