| 000 | 00631pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0849391377 | ||
| 082 |
_a621.381 _bM519G2 |
||
| 100 | _aGad-El-Hak,Mohamed | ||
| 245 | 1 | _aTHE MEMS HANDBOOK | |
| 250 | _a2nd | ||
| 260 |
_a _bCrc Press, Boca Raton _c2006 |
||
| 300 | _axii, | ||
| 440 |
_aMechanical Engineering Series _v |
||
| 500 | _aContents : V.1.Mems : Introduction And Fundamentals - V.2. Mems : Design And Fabrication - V.3. Mems : Applications | ||
| 650 | _aMicroelectromechanical Systems | ||
| 700 | _aMahajan,Roop | ||
| 964 | _gCIRC | ||
| 997 | _aA154632 C | ||
| 999 |
_c336152 _d336152 |
||