| 000 | 00499pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408bc1995 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0792395344 | ||
| 082 |
_a621.38152 _bEL51F |
||
| 100 | _aEl-Kareh,Badih | ||
| 245 | 1 | _aFUNDAMENTALS OF SEMICONDUCTOR PROCESSING TECNOLOGY | |
| 260 |
_a _bKluwer Academic Publishers, Boston _cc1995 |
||
| 300 | _axii,599 | ||
| 650 | _aSemiconductors -- Design And Construction | ||
| 650 | _aManufacturing Process | ||
| 964 | _gCIRC | ||
| 997 | _aA122963 C | ||
| 999 |
_c336106 _d336106 |
||