000 00594pam a2200205a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a354026244X
082 _a621.38152
_bP415G
100 _aPerevostchikov,V. A.
245 1 _aGETTERING DEFECTS IN SEMICONDUCTORS
260 _a
_bSpringer-Verlag, Berlin
_c2005
300 _axv,386
440 _aSpringer Series In Advanced Microelectronics
_vV. 19
650 _aGetters
650 _aSemiconductors -- Defects
650 _aElecric Engineering -- Materials
700 _aSkoupov,V. D.
964 _gCIRC
997 _aA154091 s C
999 _c335449
_d335449