000 | 00594pam a2200205a 44500 | ||
---|---|---|---|
008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
020 | _a354026244X | ||
082 |
_a621.38152 _bP415G |
||
100 | _aPerevostchikov,V. A. | ||
245 | 1 | _aGETTERING DEFECTS IN SEMICONDUCTORS | |
260 |
_a _bSpringer-Verlag, Berlin _c2005 |
||
300 | _axv,386 | ||
440 |
_aSpringer Series In Advanced Microelectronics _vV. 19 |
||
650 | _aGetters | ||
650 | _aSemiconductors -- Defects | ||
650 | _aElecric Engineering -- Materials | ||
700 | _aSkoupov,V. D. | ||
964 | _gCIRC | ||
997 | _aA154091 s C | ||
999 |
_c335449 _d335449 |