000 00556pam a2200193a 44500
008 160408b2000 xxu||||| |||| 00| 0 eng d
020 _a3540667725
082 _a621.044
_bH192S
100 _aR. J. Shul,S. J. Pearton
245 1 _aHANDBOOK OF ADVANCED PLASMA PROCESSING TECHNIQUES
260 _a
_bSpringer-Verlag, Berlin
_c2000
300 _axvi,653
650 _aPlasma Engineering
650 _aElectronic Circuits -- Design And Construction
650 _aPlasma Etching
700 _aPearton,S. J.
964 _gCIRC
997 _aA132279 C
999 _c335317
_d335317