000			00524pam a2200193a 44500
008			160408b2000 xxu||||| |||| 00| 0 eng d
020			_a3540642137
082			_a621.38152 _bG758M2
100			_aGraff,Klaus
245	1		_aMETAL IMPURITIES IN SILICON-DEVICE FABRICATION
250			_a2nd rev.
260			_a _bSpringer-Verlag, Berlin _c2000
300			_axv,268
650			_aSemiconductors -- Defects
650			_aSilicon -- Defects
650			_aSilicon -- Inclusions
964			_gCIRC
997			_aA131369 s C
999			_c334471 _d334471