000 00611pam a2200205a 44500
008 160408bc1999 xxu||||| |||| 00| 0 eng d
020 _a0792385918
082 _a621.3815
_bJ869M
100 _aJu,Y Sungtaek
245 1 _aMICROSCALE HEAT CONDUCTION IN INTEGRATED CIRCUITS AND THEIR CONSTITUENT FILMS
260 _a
_bKluwer Academic Publishers, Boston
_cc1999
300 _axii,102
440 _aMicrosystems
_v
650 _aThin Film Transistors
650 _aSemiconductors -- Cooling
650 _aHeat -- Transmission
700 _aGoodson,Kenneth E
964 _gCIRC
997 _aA131752 s C
999 _c334402
_d334402