| 000 | 00569pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b1998 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a052159054X | ||
| 082 |
_a621.3815 _bEL87S |
||
| 100 | _aElwenspoek,M. | ||
| 245 | 1 | _aSILICON MICROMACHINING | |
| 260 |
_a _bCambridge Univ. Press, Cambridge _c1998 |
||
| 300 | _axiii,405 | ||
| 440 |
_aCambridge Studies In Semiconductor Physics And Microelectronic Engineering _v |
||
| 650 | _aSilicon | ||
| 650 | _aMicromachining | ||
| 650 | _aEtching | ||
| 700 | _aJansen,H V | ||
| 964 | _gCIRC | ||
| 997 | _aA130019 C | ||
| 999 |
_c333501 _d333501 |
||