| 000 | 00546pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b1998 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471966827 | ||
| 082 |
_a621.38152 _bSE52 |
||
| 100 | _aS. A. Campbell,H. J. Lewerenz | ||
| 245 | 1 |
_aSEMICONDUCTOR MICROMACHINING _cTECHNIQUES AND INDUSTRIAL APPLICATIONS |
|
| 260 |
_a _bJohn Wiley, Chichester _c1998 |
||
| 300 | _axii,389 | ||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aSemiconductors | ||
| 700 | _aLewerenz,H. J. | ||
| 964 | _gCIRC | ||
| 997 | _aA129048 s C | ||
| 999 |
_c333066 _d333066 |
||