| 000 | 00464pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2007 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781402059483 | ||
| 082 |
_a671.35 _bM583 |
||
| 100 | _aEhmann,Kornel F. | ||
| 245 | 1 |
_aMICROMANUFACTURING _bINTERNATIONAL RESEARCH AND DEVELOPMENT |
|
| 260 |
_a _bSpringer, Aa Dordrecht _c2007 |
||
| 300 | _axxxiv,362 | ||
| 650 | _aMicrofabrication | ||
| 650 | _aMicromachining | ||
| 964 | _gCIRC | ||
| 997 | _aA158692 C | ||
| 999 |
_c332997 _d332997 |
||