| 000 | 00621pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b1999 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0521591759 | ||
| 082 |
_a621.38152 _bH637P |
||
| 100 | _aHitchon,W. N.G. | ||
| 245 | 1 | _aPLASMA PROCESSES FOR SEMICONDUCTOR FABRICATION | |
| 260 |
_a _bCambridge Univ. Press, Cambridge _c1999 |
||
| 300 | _aix,221 | ||
| 440 |
_aCambridge Studies In Semiconductor Physics And Microelectronic Engineering _v |
||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aSemiconductors -- Ething | ||
| 650 | _aPlasma Ething | ||
| 964 | _gCIRC | ||
| 997 | _aA128874 C | ||
| 999 |
_c332888 _d332888 |
||