| 000 | 00383pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1978 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.38173 _bT384 |
||
| 100 | _a | ||
| 245 | 1 | _aTHIN FILM PROCESSES | |
| 260 |
_a _bAcademic Press,New York _c1978 |
||
| 300 | _axi,564 | ||
| 500 | _aIncludes References | ||
| 650 | _aThin Films | ||
| 964 | _gCIRC | ||
| 997 | _aA127034 Text T | ||
| 999 |
_c331305 _d331305 |
||