| 000 | 00665pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408bc1997 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0852969112 | ||
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a670 _bH192r |
||
| 245 | 1 |
_aHANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION _cedited by P. Rai-Choudhury _bMICROMACHINING AND MICROFABRICATION |
|
| 260 |
_bSpie-Optical Engineering Press _c1997 _aBellingham |
||
| 300 | _aviii, 692p | ||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aMicrolithography | ||
| 650 | _aMicromachining | ||
| 650 | _aMicrofabrication | ||
| 700 | _aRai-Choudhury, P. [ed.] | ||
| 942 | _cBK | ||
| 999 |
_c330627 _d330627 |
||