| 000 | 00574pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b1996 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3527268294 | ||
| 082 |
_a621.38152 _bP942J |
||
| 100 | _aKenneth A. Jackson | ||
| 245 | 1 | _aPROCESSING OF SEMICONDUCTORS | |
| 260 |
_a _bVch Verlagsgesellschaft,Weinheim _c1996 |
||
| 300 | _a689 | ||
| 440 |
_aMaterials Science And Technology _v |
||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aSemiconductors | ||
| 650 | _aMaterials | ||
| 700 | _aCahn,R. W. | ||
| 964 | _gCIRC | ||
| 997 | _aA124264 C | ||
| 999 |
_c328047 _d328047 |
||