| 000 | 00549pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408bc1990 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0070370567 | ||
| 082 |
_a621.38171 _bL512f |
||
| 100 | _aLee, Hong H. | ||
| 245 | 1 | _aFUNDAMENTALS OF MICROELECTRONICS PROCESSING | |
| 260 |
_aNew York _bMcgraw-Hill _cc1990 |
||
| 300 | _axvi,514 | ||
| 440 |
_aMcgraw-Hill Chemical Engineering Series _v |
||
| 650 | _aIntegrated Circuits -- Design And Construction | ||
| 650 | _aIntegrated Circuits -- Materials | ||
| 964 | _gCIRC | ||
| 997 | _aA107344 C | ||
| 999 |
_c327771 _d327771 |
||