000 00496pam a2200181a 44500
008 160408b1989 xxu||||| |||| 00| 0 eng d
020 _a0824779908
082 _a621.3817
_bM587
100 _aHtoo, Maung S.
245 1 _aMICROELECTRONIC POLYMERS
260 _aNew York
_bMarcel Dekker
_c1989
300 _aix,407
650 _aPolymers And Polymerization
650 _aMicrolithography -- Materials
650 _aMicroelectronics -- Materials
964 _gCIRC
997 _aA104782 s C
999 _c327716
_d327716