000 | 00496pam a2200181a 44500 | ||
---|---|---|---|
008 | 160408b1989 xxu||||| |||| 00| 0 eng d | ||
020 | _a0824779908 | ||
082 |
_a621.3817 _bM587 |
||
100 | _aHtoo, Maung S. | ||
245 | 1 | _aMICROELECTRONIC POLYMERS | |
260 |
_aNew York _bMarcel Dekker _c1989 |
||
300 | _aix,407 | ||
650 | _aPolymers And Polymerization | ||
650 | _aMicrolithography -- Materials | ||
650 | _aMicroelectronics -- Materials | ||
964 | _gCIRC | ||
997 | _aA104782 s C | ||
999 |
_c327716 _d327716 |