| 000 | 00482pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408bc1989 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0792303091 | ||
| 082 |
_a621.38152 _bG519 |
||
| 100 | _aTanaka, K. | ||
| 245 | 1 | _aGLOW DISCHARGE OF HYDROGENATED AMORPHOUS SILICON | |
| 260 |
_aTokyo _bKtk Scientific Pub. _cc1989 |
||
| 300 | _ax,277 | ||
| 650 | _aAmorphous Semiconductors | ||
| 650 | _aSilicon | ||
| 650 | _aGlow Discharges | ||
| 964 | _gCIRC | ||
| 997 | _aA110934 s C | ||
| 999 |
_c327501 _d327501 |
||