| 000 | 00657pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b1995 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a012137940X | ||
| 082 |
_a621.38152 _bP695 |
||
| 100 | _aGiovanni No Bruno,Pio No Capezzuto,Arun No Madan | ||
| 245 | 1 | _aPLASMA DEPOSITION OF AMORPHOUS SILICON-BASED MATERIALS | |
| 260 |
_a _bAcademic Press, Boston _c1995 |
||
| 300 | _axi,324 | ||
| 440 |
_aPlasma-Materials Interactions _v |
||
| 650 | _aAmorphous Semiconductors -- Design And Construction | ||
| 650 | _aSilicon Alloys | ||
| 650 | _aPlasma-Enhanced Chemical Vapor Deposition | ||
| 700 | _aMadan,Arun | ||
| 964 | _gCIRC | ||
| 997 | _aA123102 C | ||
| 999 |
_c327102 _d327102 |
||