| 000 | 00497pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b1989 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0852742703 | ||
| 082 |
_a621.38171 _bG919m |
||
| 100 | _aGrovenor, C. R. M. | ||
| 245 | 1 | _aMICROELECTRONIC MATERIALS | |
| 260 |
_aBristol _bInstitute Of Physics _c1989 |
||
| 300 | _ax,544 | ||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aMicroelectronic Devices. Design And Manufacture | ||
| 964 | _gCIRC | ||
| 997 | _aA116692 C | ||
| 999 |
_c324894 _d324894 |
||